The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Apr. 12, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Robert Trauner, Pliening, DE;
Bernhard Schüler, Munich, DE;
Bernhard G. Mueller, Finsing, DE;
Nikolai Knaub, Munich, DE;
Kulpreet Singh Virdi, Munich, DE;
Robert Trauner, Pliening, DE;
Bernhard Schüler, Munich, DE;
Bernhard G. Mueller, Finsing, DE;
Nikolai Knaub, Munich, DE;
Kulpreet Singh Virdi, Munich, DE;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method of automatically focusing a charted particle beam on a surface region of a sample is provided. The method includes acquiring a plurality of images for a corresponding plurality of focusing strength values; calculating a plurality of sharpness values based on the plurality of images, the plurality of sharpness values are calculated with a sharpness function provided as a sum in a frequency space based on the plurality of images; and determining subsequent focusing strength values of the plurality of focusing strength values with a golden ratio search algorithm based one the calculated sharpness values.