The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
May. 22, 2019
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Atsushi Kimura, Saitama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 59/00 (2006.01); B29C 59/02 (2006.01); G03F 7/20 (2006.01); G03F 9/00 (2006.01); B29C 59/04 (2006.01); G03F 7/16 (2006.01); B29C 59/16 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 59/00 (2013.01); B29C 59/002 (2013.01); B29C 59/02 (2013.01); B29C 59/022 (2013.01); B29C 59/026 (2013.01); B29C 59/04 (2013.01); B29C 59/046 (2013.01); B29C 59/16 (2013.01); G03F 7/161 (2013.01); G03F 7/7065 (2013.01); G03F 7/7085 (2013.01); G03F 7/70483 (2013.01); G03F 7/70491 (2013.01); G03F 7/70616 (2013.01); G03F 7/70808 (2013.01); G03F 7/70908 (2013.01); G03F 7/70916 (2013.01); G03F 9/7049 (2013.01); G03F 9/7069 (2013.01); G03F 9/7076 (2013.01);
Abstract
A molding apparatus that molds a composition on a substrate with a mold includes a mold holding unit configured to hold the mold, a substrate holding unit configured to hold the substrate, a first elastic member configured to apply a first elastic force to the mold holding unit in a direction away from the substrate holding unit, and a control unit configured to cause the mold holding unit to move in the direction away from the substrate holding unit in a case where the control unit determines that an abnormality has occurred.