The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Feb. 14, 2019
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Denis Pelenc, Grenoble, FR;
Xavier Zucchi, Grenoble, FR;
Claire Vialle, Grenoble, FR;
Valerie Goudon, Grenoble, FR;
Abdelkader Aliane, Grenoble, FR;
Assignee:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); G01J 5/04 (2006.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); G01J 5/046 (2013.01);
Abstract
The invention relates to a process for manufacturing a microbolometer () comprising a sensitive material () based on vanadium oxide (VO) comprising an additional chemical element chosen from among boron (B), carbon (C), with the exception of nitrogen (N), comprising the following steps: