The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Jun. 05, 2020
Analog Devices, Inc., Wilmington, MA (US);
Jeffrey A. Gregory, Malden, MA (US);
Charles Blackmer, Londonderry, NH (US);
Tyler Adam Dunn, Westford, MA (US);
Eugene Oh Hwang, Long Beach, CA (US);
Jinbo Kuang, Acton, MA (US);
Kemiao Jia, Tolland, CT (US);
Laura Cornelia Popa, Madison, NJ (US);
Igor P. Prikhodko, Buzzards Bay, MA (US);
Erdinc Tatar, Burlington, MA (US);
Analog Devices, Inc., Wilmington, MA (US);
Abstract
Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.