The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 07, 2021
Filed:
Mar. 06, 2020
Applicant:
Denso Corporation, Kariya, JP;
Inventor:
Shuhei Ichikawa, Nisshin, JP;
Assignee:
DENSO CORPORATION, Kariya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); C30B 29/16 (2006.01); C30B 23/02 (2006.01); H01L 21/02 (2006.01); C30B 35/00 (2006.01);
U.S. Cl.
CPC ...
C30B 29/16 (2013.01); C30B 23/02 (2013.01); C30B 35/00 (2013.01); H01L 21/02565 (2013.01); H01L 21/02631 (2013.01);
Abstract
A sputtering equipment configured to grow a gallium oxide film on a substrate is proposed, and the sputtering equipment may include: a chamber; a stage located in the chamber and configured to secure the substrate thereon; a gallium target located in the chamber and including gallium elements; a first power supply configured to apply voltage to the gallium target; and an oxygen element supplier configured to supply oxygen elements into the chamber.