The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Sep. 05, 2018
Applicant:
Kyocera Tikitin Oy, Espoo, FI;
Inventors:
Aarne Oja, Espoo, FI;
Antti Jaakkola, Espoo, FI;
Assignee:
KYOCERA Tikitin Oy, Espoo, FI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03B 5/04 (2006.01); H01L 41/047 (2006.01); H03B 5/32 (2006.01);
U.S. Cl.
CPC ...
H03B 5/04 (2013.01); H01L 41/047 (2013.01); H03B 5/32 (2013.01);
Abstract
A temperature-compensated microelectromechanical oscillator and a method of fabricating thereof. The oscillator includes a resonator element including highly doped silicon and an actuator for exciting the resonator body into a resonance mode having a characteristic frequency-vs-temperature curve. The properties of the resonator element and the actuator are chosen such that the curve has a high-temperature turnover point at a turnover temperature of 85° C. or more. In addition, the oscillator comprises a thermostatic controller for keeping the temperature of the resonator element at said high turnover temperature.