The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Aug. 31, 2016
Applicant:
Sumitomo Precision Products Co., Ltd., Amagasaki, JP;
Inventors:
Assignee:
Sumitomo Precision Products Co., Ltd., Amagasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01); H01L 41/29 (2013.01); H01L 41/09 (2006.01); H01L 41/053 (2006.01); H01L 41/23 (2013.01); H01L 41/187 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0478 (2013.01); H01L 41/047 (2013.01); H01L 41/0475 (2013.01); H01L 41/0533 (2013.01); H01L 41/09 (2013.01); H01L 41/23 (2013.01); H01L 41/29 (2013.01); H01L 41/1876 (2013.01); H01L 41/1878 (2013.01);
Abstract
This piezoelectric element includes a lower electrode formed on a substrate, a piezoelectric layer formed on the lower electrode, and an upper electrode formed on the piezoelectric layer. The upper electrode includes a first upper electrode layer made of a metal oxide including an amorphous portion at least at a boundary with the piezoelectric layer and a second upper electrode layer formed on the first upper electrode layer.