The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Jun. 12, 2019
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Bo Seung Hwang, Yongin-si, KR;
Seung Keun Jun, Asan-si, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/68 (2006.01); B25J 9/16 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); B25J 9/163 (2013.01); B25J 9/1694 (2013.01); H01L 21/68 (2013.01); B65G 47/907 (2013.01); B65G 2201/0297 (2013.01);
Abstract
A stocker may include a load port which a cassette for receiving wafers is either loaded on or unloaded from, an aligner configured to align the wafers and to confirm identification codes of the wafers, a plurality of shelves each having slots for receiving the wafers, a first transfer robot having a first robot arm for transferring the wafers between the load port and the aligner and a second transfer robot having a second robot arm for transferring the wafers between the aligner and the shelves.