The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Oct. 17, 2019
Applied Materials, Inc., Santa Clara, CA (US);
Paul B. Reuter, Austin, TX (US);
Dean C. Hruzek, Cedar Park, TX (US);
Nir Merry, Mountain View, CA (US);
John C. Menk, Round Rock, TX (US);
Douglas B. Baumgarten, Round Rock, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Electronic device processing systems including an equipment front end module with at least one side storage pod are described. The side storage pod has a side storage container and a container plenum. A fan draws purge gas from the equipment front end module chamber into the container plenum where the purge gas is directed into the side storage container to pass over substrates stored therein and is then exhausted back into the equipment front end module chamber. Methods and systems are also disclosed.