The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Apr. 18, 2018
Screen Holdings Co., Ltd., Kyoto, JP;
Yoshio Ito, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
Abstract
Halogen lamps arranged in two, upper and lower, tiers to intersect each other in a lattice pattern are provided under a chamber for receiving a semiconductor wafer therein. In a location where the halogen lamps in the upper and lower tiers overlap each other, a reflector is provided such that an outer wall surface of a glass tube of each halogen lamp is open on upper and lower sides. In the location where the halogen lamps in the upper and lower tiers overlap each other, light emitted upwardly from a halogen lamp in the lower tier is transmitted through the open upper and lower portions of the outer wall surface of the glass tube of a halogen lamp in the upper tier, and is directed further upwardly. Thus, the light is prevented from entering the glass tube of the halogen lamp in the lower tier again.