The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 2021

Filed:

May. 26, 2020
Applicants:

Beijing Normal University, Beijing, CN;

Wenli (Guangdong) Technology Co., Ltd., Yunfu, CN;

Inventors:

Bin Liao, Beijing, CN;

Xiaoping Ouyang, Beijing, CN;

Qingsong Hua, Beijing, CN;

Jun Luo, Beijing, CN;

Lin Chen, Beijing, CN;

Xu Zhang, Beijing, CN;

Xianying Wu, Beijing, CN;

Pan Pang, Beijing, CN;

Ran Han, Beijing, CN;

Minju Ying, Beijing, CN;

Weifeng He, Beijing, CN;

Guangyu He, Beijing, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 14/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32669 (2013.01); C23C 14/325 (2013.01); H01J 37/32055 (2013.01); H01J 2237/057 (2013.01); H01J 2237/332 (2013.01);
Abstract

The present invention discloses a magnetic filter tube, and relates to the technical field of magnetic filters. The magnetic filter tube includes a first rectangular tube and a second rectangular tube, where one end of the first rectangular tube is fixedly connected to one end of the second rectangular tube; the other end of the first rectangular tube forms an inlet of the magnetic filter tube; the inlet of the magnetic filter tube is connected with a cathode target flange; the other end of the second rectangular tube forms an outlet of the magnetic filter tube; the outlet of the magnetic filter tube is connected with a vacuum chamber; an inner wall of the first rectangular tube and an inner wall of the second rectangular tube are each provided with a protrusion and a groove; the protrusion is filled with cold water.


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