The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Jun. 18, 2019
Samsung Electronics Co., Ltd., Suwon-si, KR;
Jin-Uk Park, Hwaseong-si, KR;
Sun-Ho Kim, Seoul, KR;
Sung-Jin Kim, Suwon-si, KR;
Jong-Geug Kim, Suwon-si, KR;
Kyu-Chul Shim, Hwaseong-si, KR;
Ji-Hoon Yeo, Hwaseong-si, KR;
Shin-Sang Lee, Seoul, KR;
Gyu-Chan Jeoung, Hwaseong-si, KR;
Sung-Wook Jung, Seoul, KR;
Jae-Chul Hwang, Seoul, KR;
Abstract
An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.