The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Apr. 29, 2020
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Akinori Shirato, Sagamihara, JP;
Takashi Shibuya, Fujisawa, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); B41J 2/465 (2006.01); G02B 26/10 (2006.01); G02F 1/13 (2006.01); G01B 11/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); B41J 2/465 (2013.01); G02B 26/10 (2013.01); G02F 1/1303 (2013.01); G03F 7/20 (2013.01); G03F 7/70775 (2013.01); G01B 11/002 (2013.01);
Abstract
A control system, of a plurality of heads, acquires grating correction information related to at least two of scales in a first grating group and scales in a second grating group, based on position information of a movable body measured using at least four heads irradiating measurement beams on at least two of the scales and scales. The grating correction information is used to control movement of the movable body using at least three heads irradiating at least two of the scales and scales.