The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 30, 2021
Filed:
Jun. 19, 2019
Applicant:
Meas France Sas, Toulouse, FR;
Inventor:
Emilien Durupt, Francarville, FR;
Assignee:
MEAS FRANCE, Toulouse, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/22 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 27/223 (2013.01); G01N 27/121 (2013.01); G01N 27/227 (2013.01);
Abstract
The present invention relates to a method of manufacturing a relative humidity sensor comprising the step of; a) providing a first electrode on or over a substrate, b) providing a non-porous inorganic dielectric layer over the first electrode, c) providing a second electrode over the inorganic dielectric layer, and d) forming a pattern of voids in the second electrode and the inorganic dielectric layer through the second electrode. The invention also relates to a relative humidity sensor, in particular one obtained by the inventive method.