The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 2021

Filed:

Jul. 03, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Yongchun Xin, Poughkeepsie, NY (US);

Daniel Piper, Vancouver, WA (US);

Jonathan Fry, Fishkill, NY (US);

Jang Sim, Dutchess, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
F16K 99/00 (2006.01);
U.S. Cl.
CPC ...
F16K 99/004 (2013.01); F16K 99/0011 (2013.01); F16K 99/0013 (2013.01); F16K 2099/0074 (2013.01); F16K 2099/0084 (2013.01); F16K 2099/0088 (2013.01);
Abstract

A micro electrical mechanical system (MEMS) valve is provided. The MEMS valve includes first and second bodies, a medium and a thermal element. The first body defines a first channel and a second channel intersecting the first channel. The second body defines a third channel and is movable within the first channel between first and second positions. When the second body is at the first positions, the second and third channels align and permit flow through the second and third channels. When the second body is at the second positions, the second and third channels misalign and inhibit flow through the second channel. The medium is charged into the first channel at opposite sides of the second body. The thermal element is proximate to the first channel and is operable to cause the medium to drive movements of the second body to the first or the second positions.


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