The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 30, 2021

Filed:

May. 09, 2019
Applicant:

Matthews International Corporation, Pittsburgh, PA (US);

Inventors:

William A. Buskirk, Albany, OR (US);

Steven E. Flego, Portland, OR (US);

Charles C. Haluzak, Philomath, OR (US);

John Whitlock, Pittsburgh, PA (US);

Eric R. Miller, Seattle, WA (US);

Glenn J. T. Leighton, South Yorkshire, GB;

Charles Gilson, Philomath, OR (US);

Assignee:

Matthews International Corporation, Pittsburgh, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); F16K 99/00 (2006.01); H01L 41/047 (2006.01); H01L 41/053 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
B41J 2/14282 (2013.01); B41J 2/14201 (2013.01); B41J 2002/14491 (2013.01); B41J 2202/05 (2013.01); B41J 2202/18 (2013.01); F16K 99/0048 (2013.01); F16K 2099/0092 (2013.01); H01L 41/0475 (2013.01); H01L 41/0533 (2013.01); H01L 41/094 (2013.01);
Abstract

A micro-valve includes an orifice plate including an orifice. The micro-valve further includes an actuating beam having a first end and a second end. The actuating beam also includes a base layer and a layer of piezoelectric material disposed on the base layer, a bottom electrode layer, and a top electrode layer. At an electrical connection portion of the actuating beam, the layer of piezoelectric material includes a first via, and a portion of the top electrode layer disposed within the first via, and a portion of the bottom electrode disposed beneath the first via. The actuating beam includes a base portion extending from the electrical connection portion and a cantilevered portion extending from the base portion. The cantilevered portion is movable in response to application of a differential electrical signal between the bottom electrode layer and the top electrode layer to one of open or close the micro-valve.


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