The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Oct. 04, 2018
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Francesco Procopio, Sedriano, IT;
Attilio Frangi, Milan, IT;
Assignee:
STMicroelectronics S.r.l., Agrate Brianza, IT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/18 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
H02N 2/186 (2013.01); H01L 41/1136 (2013.01); H02N 2/181 (2013.01);
Abstract
A piezoelectric transducer includes an anchorage and a beam of semiconductor material extending in cantilever fashion from the anchorage in a main direction parallel to a first axis and having a face parallel to a first plane defined by the first axis and by a second axis perpendicular to the first axis. A piezoelectric layer is on the face of the beam. A cross-section of the beam is perpendicular to the first axis and is asymmetrical and shaped so the beam deformations out of the first plane in response to forces applied to the anchorage and oriented parallel to the first axis.