The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 2021

Filed:

Feb. 05, 2019
Applicant:

Hiwin Mikrosystem Corp., Taichung, TW;

Inventors:

Chun-Hsiang Li, Taichung, TW;

Chih-Kai Fan, Taichung, TW;

Yu-Jung Chang, Taichung, TW;

Assignee:

HIWIN MTKROSYSTEM CORP., Taichung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02N 2/02 (2006.01); H01L 21/68 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H02N 2/028 (2013.01); H01L 21/68 (2013.01); H01L 21/67346 (2013.01); H02N 2/02 (2013.01);
Abstract

A flexure stage with modularized flexure units for convenient manufacturing, assembly and repair is provided. The flexure stage comprises a base, a platform separated from the base, and a plurality of flexure units disposed between the base and the platform. Each flexure unit comprises a first section, a second section, and a third section. The first section is located on the base. The second section is connected with the platform and separated from the first section. The third section is coupled with the first section and the second section through the first bending part and the second bending part respectively wherein the first bending part and the second bending part comprises flexibility in different axial directions.


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