The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Feb. 20, 2020
Applicant:
Coherent Lasersystems Gmbh & Co. KG, Göttingen, DE;
Inventors:
Assignee:
Coherent LaserSystems GMBH & Co. KG, Göttingen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/082 (2006.01); H01S 3/034 (2006.01); H01S 3/08 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01S 3/034 (2013.01); H01S 3/082 (2013.01); H01S 3/0804 (2013.01); H01S 3/08081 (2013.01); H01S 3/225 (2013.01); H01S 2301/20 (2013.01);
Abstract
Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.