The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Dec. 09, 2015
Hanwha Q Cells Gmbh, Bitterfeld-Wolfen, DE;
Anika Weihrauch, Koethen, DE;
HANWHA Q CELLS GMBH, Bitterfeld-Wolfen, DE;
Abstract
An in-line wet bench device for the wet-chemical treatment of semiconductor wafers, comprising a plurality of conveying rollers, each of which is rotatable about an axis of rotation, for the in-line transport of semiconductor wafers along a conveying direction, wherein the axes of rotation are arranged parallel to one another and perpendicular to the conveying direction, the conveying rollers having a cylindrical conveying section which extends axially along the respective axis of rotation and forms a conveying surface in the shape of a cylindrical sleeve. The conveying surface has at least one smooth region with surface roughnesses of less than 10 μm when viewed in the axial direction and rough regions with surface roughnesses of more than 100 μm axially adjacent to the smooth region.