The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 23, 2021

Filed:

Mar. 26, 2015
Applicant:

Hitachi High-technologies Corporation, Tokyo, JP;

Inventors:

Naoshi Itabashi, Tokyo, JP;

Sonoko Migitaka, Tokyo, JP;

Itaru Yanagi, Tokyo, JP;

Rena Akahori, Tokyo, JP;

Kenichi Takeda, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/63 (2006.01); G01N 27/00 (2006.01); G01N 27/92 (2006.01); G01N 27/447 (2006.01); G01N 21/64 (2006.01); G01N 21/65 (2006.01); G01N 33/487 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G01N 27/44721 (2013.01); G01N 21/648 (2013.01); G01N 21/6486 (2013.01); G01N 21/658 (2013.01); G01N 27/44791 (2013.01); G01N 33/48721 (2013.01); B82Y 40/00 (2013.01);
Abstract

While an insulating film having a near-field light generating element placed thereon is being irradiated with light in an electrolytic solution, or after the film that has been irradiated with light is disposed in the electrolytic solution, a first voltage is applied between the two electrodes installed in the electrolytic solution across the film, a second voltage is then applied between the two electrodes, and a value of a current that flows between the two electrodes due to the application of the second voltage is detected. This procedure is stopped when the current value reaches or exceeds a pre-set threshold value, whereby a hole is formed at a desired location in the thin-film.


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