The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
Feb. 14, 2019
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Denis Pelenc, Grenoble, FR;
Xavier Zucchi, Grenoble, FR;
Claire Vialle, Grenoble, FR;
Valerie Goudon, Grenoble, FR;
Abdelkader Aliane, Grenoble, FR;
Abstract
A process for manufacturing at least one microbolometer comprising a sensitive material based on vanadium oxide containing nitrogen as additional chemical element, includes steps of determining a non-zero effective amount of the additional chemical element starting from which the sensitive material, having undergone a step of exposure to a temperature Tfor a duration Δt, has an electrical resistivity ρat ambient temperature greater than or equal to 50% of the native value ρof said sensitive material at ambient temperature; producing the sensitive material in a thin layer having an amount of the additional chemical element greater than or equal to the effective amount determined beforehand, the sensitive material being amorphous and having an electrical resistivity of between 1 and 30 Ω·cm; and exposing the sensitive material to a temperature Tfor a duration Δt.