Micro valve fluid pump, and method of operating a fluid pump having a diaphragm attached to a body and deflectable to open and close a fluidic pathway by contacting a valve seat having a stretchable elastic body with a changing height

Abstract

A fluid pump for pumping a fluid from an inlet toward an outlet comprises a pump body, a pump diaphragm, and a valve seat. The pump body has a first opening and a second opening. The pump diaphragm is attached to the pump body and forms a pump chamber between the pump body and the pump diaphragm. The pump chamber is fluidly connected to the inlet by the first opening and to the outlet by the second opening. The valve seat is disposed inside the pump chamber and around the second opening. The valve seat protrudes with an undeformed height from the second opening into the pump chamber in a direction toward the pump diaphragm. The valve seat has an elastic body and a gasket with a sealing surface. The pump diaphragm is deflectable and is adapted to open and close a fluidic pathway of the outlet by moving into and out of contact with the valve seat.