The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 23, 2021
Filed:
May. 27, 2020
Applicant:
Skc Solmics Co., Ltd., Pyeongtaek-si, KR;
Inventor:
Hyeongju Lee, Yongin-si, KR;
Assignee:
SKC SOLMICS CO., LTD., Pyeongtaek-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); H01L 21/306 (2006.01); B24B 7/22 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 7/228 (2013.01); H01L 21/30625 (2013.01);
Abstract
A composition for semiconductor processing comprises: polishing particles; a thiazolinone compound; and a solvent, wherein a logarithmic reduction factor of a microorganism in the composition, as calculated by Formula 1, is at least 4:Logarithmic reduction factor=log(CFU/CFU)  Formula 1
Quick Actions:
Lee, Hyeongju. (2021). Composition for semiconductor processing and method for polishing substrate using the same (U.S. Patent No. 11180679). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11180679
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile