The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Sep. 10, 2019
Applicant:
Alliance for Sustainable Energy, Llc, Golden, CO (US);
Inventors:
Aaron Joseph Ptak, Littleton, CO (US);
Kevin Louis Schulte, Denver, CO (US);
John David Simon, Austin, TX (US);
Assignee:
Alliance for Sustainable Energy, LLC, Golden, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0236 (2006.01); H01L 31/18 (2006.01); H01L 31/0735 (2012.01); H01L 31/0445 (2014.01); H01L 31/054 (2014.01);
U.S. Cl.
CPC ...
H01L 31/02363 (2013.01); H01L 31/0445 (2014.12); H01L 31/0547 (2014.12); H01L 31/0735 (2013.01); H01L 31/186 (2013.01); H01L 31/1844 (2013.01);
Abstract
The present disclosure relates to a method that includes contacting a surface of a first layer that includes a Group III element and a Group V element with a gas that includes HCl, where the first layer is positioned in thermal contact with a wafer positioned in a chamber of a reactor, and the contacting results in a roughening of the surface.