The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Jul. 25, 2018
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Hema Swaroop Mopidevi, Fremont, CA (US);
Neil Martin Paul Benjamin, Palo Alto, CA (US);
John Pease, San Mateo, CA (US);
Thomas Anderson, Hayward, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/683 (2006.01); H01F 27/36 (2006.01); H01F 27/34 (2006.01);
U.S. Cl.
CPC ...
H01F 27/36 (2013.01); H01J 37/32091 (2013.01); H01J 37/32651 (2013.01); H01F 2027/348 (2013.01); H01J 37/32183 (2013.01); H01L 21/6831 (2013.01);
Abstract
In some examples, a magnetic shield for a plasma source is provided. An example magnetic shield comprises a back-shell. The back-shell includes a cage defined, at least in part, by an arrangement of bars of ferro-magnetic material. The cage is sized and configured to at least extend over a top side of an RF source coil for the plasma source.