The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Aug. 12, 2019
Microsoft Technology Licensing, Llc, Redmond, WA (US);
Michael James Nystrom, Redmond, WA (US);
Wyatt Owen Davis, Bothell, WA (US);
Jincheng Wang, Sammamish, WA (US);
Microsoft Technology Licensing, LLC, Redmond, WA (US);
Abstract
A system that includes a substrate for microelectromechanical system (MEMS) scanning mirror systems is provided. The MEMS scanning mirror system includes a substrate that includes a ceramic body. An actuator frame is mounted on the ceramic body of the substrate. The actuator frame includes at least one moveable member. At least one actuator is operatively connected to the at least one moveable member such that the actuator is configured to move the at least one moveable member. A scanning mirror assembly is mounted to the at least one moveable member such that movement of the at least one moveable member moves the scanning mirror assembly.