The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 16, 2021

Filed:

Apr. 25, 2019
Applicant:

Microsoft Technology Licensing, Llc, Redmond, WA (US);

Inventor:

Utku Baran, Seattle, WA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G01L 1/16 (2006.01); G01L 1/18 (2006.01); G02B 26/10 (2006.01); H02N 2/02 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0858 (2013.01); G01L 1/16 (2013.01); G01L 1/18 (2013.01); G02B 26/105 (2013.01); H02N 2/028 (2013.01);
Abstract

The present disclosure relates to a microelectromechanical systems (MEMS) scanner that implements piezoelectric actuation principles to facilitate rotational displacement of a mirror device. The present disclosure includes a MEMS scanning device having a mirror device, a torsional beam structure, and piezoelectric actuators having a shape that facilitates torsional force to be applied to the torsional beam structure and cause the mirror device to rotate about a longitudinal axis. The MEMS scanning device may further include a lever device including multiple stages to both transfer torsional force from the actuators and prevent different actuators from countering torsional forces of other actuators. Moreover, the MEMS scanning device may further include sensor elements to measure torsional forces and control movement of the mirror device.


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