The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Oct. 29, 2019
Canon Kabushiki Kaisha, Tokyo, JP;
Akira Yabuki, Shimotsuga-gun, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
A foreign substance inspection apparatus according to the present invention detects a foreign substance on a substrate, and includes a detection unit that includes a light projector configured to project light to a surface of the substrate and a light receiver configured to receive scattered light from the surface, an adjustment mechanism configured to adjust a light quantity of the scattered light received by the light receiver, and a control unit configured to perform foreign substance detection in a state where sensitivity of the detection unit is changed to low sensitivity, after performing foreign substance detection in a state where the sensitivity of the detection unit is set to high sensitivity by adjusting the light quantity of the scattered light received by the light receiver.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile