The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Oct. 03, 2018
Olympus Corporation, Tokyo, JP;
Yoshimasa Suzuki, Kawasaki, JP;
OLYMPUS CORPORATION, Tokyo, JP;
Abstract
A sample shape measuring method includes a step of preparing illumination light that is to be passed through a predetermined illumination region, a step of irradiating the illumination light to a sample, and a predetermined processing step. The predetermined illumination region is set such that an area of a region of the illumination light passing through a pupil of an observation optical system is smaller than an area of the pupil of the observation optical system. The predetermined processing step includes a step of receiving light emerged from the observation optical system, a step of computing a position of an image of the predetermined illumination region from light received, a step of computing a difference between the position of the image of the predetermined illumination region and a reference position, and a step of calculating an amount of inclination at a surface of the sample, from the difference calculated.