The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2021
Filed:
Jan. 16, 2018
Applicant:
Cirrus Logic International Semiconductor Ltd., Edinburgh, GB;
Inventor:
Tsjerk Hans Hoekstra, Balerno, GB;
Assignee:
Cirrus Logic, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 25/00 (2006.01); B81B 3/00 (2006.01); H04R 19/00 (2006.01); G01H 9/00 (2006.01); B81C 1/00 (2006.01); H04R 23/00 (2006.01); H04R 31/00 (2006.01); H04R 7/04 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 3/0029 (2013.01); B81C 1/00158 (2013.01); G01H 9/00 (2013.01); G01H 9/004 (2013.01); H04R 19/005 (2013.01); H04R 23/008 (2013.01); H04R 31/006 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0109 (2013.01); H04R 7/04 (2013.01); H04R 2201/003 (2013.01);
Abstract
There is provided a flexible membrane for use in a microelectromechanical transducer, the flexible membrane comprising an electromagnetic waveguide. There is further provided a microelectromechanical system comprising a substrate which comprises the flexible membrane, and a process for forming the flexible membrane. The flexible membrane may be configured to operate within an optical microphone system.