The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Dec. 10, 2020
Xi'an Jiaotong University, Shaanxi, CN;
Bian Tian, Shaanxi, CN;
Zhongkai Zhang, Shaanxi, CN;
Yan Liu, Shaanxi, CN;
Zhaojun Liu, Shaanxi, CN;
Jiangjiang Liu, Shaanxi, CN;
Cunfeng Wang, Shaanxi, CN;
Peng Shi, Shaanxi, CN;
Qijing Lin, Shaanxi, CN;
Zhuangde Jiang, Shaanxi, CN;
Xi'an Jiaotong University, Xi'an, CN;
Abstract
A thin-film thermocouple probe includes a columnar substrate, a tungsten-26% rhenium film and an indium oxide (InO) film. A side surface of the columnar substrate is provided with a first straight groove and a second straight groove. The tungsten-26% rhenium film is arranged on a front end surface of the columnar substrate and in the first straight groove. The indium oxide film is arranged on the front end surface of the columnar substrate and in the second straight groove. The indium oxide film on the front end surface of the columnar substrate is connected to the tungsten-26% rhenium film on the front end surface of the columnar substrate. A first metal lead wire is connected to the tungsten-26% rhenium film, and a second metal lead wire is connected to the indium oxide film. A method of preparing the thin-film thermocouple probe is provided.