The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Mar. 27, 2018
Nippon Control System Corporation, Tokyo, JP;
Dai Tsunoda, Kanagawa, JP;
Nobuyasu Takahashi, Kanagawa, JP;
NIPPON CONTROL SYSTEM CORPORATION, Tokyo, JP;
Abstract
A simulation apparatus includes: a factor amount converting information storage unit in which factor amount converting information, which is information indicating correspondence between low-fidelity information and high-fidelity information, is stored; a writing pattern information storage unit in which writing pattern information is stored; an ADI simulation unit that performs an ADI simulation using one or more evaluation points, for a writing pattern indicated by the writing pattern information, thereby acquiring one or more factor amounts; a converting unit that acquires high-fidelity information, which is one or more factor amounts, corresponding to the low-fidelity information, which is one or more factor amounts, using the factor amount converting information; and an etching simulation unit that performs an etching simulation using the one or more factor amounts acquired by the converting unit.