The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 09, 2021

Filed:

Aug. 26, 2019
Applicant:

Waviks, Inc., Dallas, TX (US);

Inventors:

Gregory A. Magel, Dallas, TX (US);

Thomas M. Moore, Dallas, TX (US);

Assignee:

Waviks, Inc., Dallas, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01J 5/10 (2006.01); G01J 5/08 (2006.01); H01J 37/22 (2006.01); G02B 6/036 (2006.01); G02B 6/42 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
G01J 5/025 (2013.01); G01J 5/0806 (2013.01); G01J 5/0815 (2013.01); G01J 5/0821 (2013.01); G01J 5/0896 (2013.01); G01J 5/10 (2013.01); G02B 6/036 (2013.01); G02B 6/4246 (2013.01); H01J 37/226 (2013.01); H01J 37/26 (2013.01); H01J 2237/24585 (2013.01);
Abstract

An optical pyrometer having a coaxial light guide delivers laser radiation through optics to heat a localized area on a sample, and simultaneously collects optical radiation from the sample to perform temperature measurement of the heated area. Inner and outer light guides can comprise the core and inner cladding, respectively, of a double-clad fiber (DCF), or can be formed using a combination of optical fibers in one or more coaxial bundles. Coaxial construction and shared optics facilitate alignment of the centers of the heated and observed areas on the sample. The heated area can be on the order of micrometers when using a single-mode optical fiber core as the inner light guide. The system can be configured to heat small samples within a vacuum system of charged-particle beam microscopes such as electron microscopes. A method for using the invention in a microscope is also provided.


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