The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Mar. 31, 2017
Applicant:
Universal Display Corporation, Ewing, NJ (US);
Inventors:
Edwin van den Tillaart, Eindhoven, NL;
Sven Pekelder, Eindhoven, NL;
Mark Meuwese, Eindhoven, NL;
William E. Quinn, Whitehouse Station, NJ (US);
Gregory McGraw, Yardley, PA (US);
Gregg Kottas, Ewing, NJ (US);
Assignee:
Universal Display Corporation, Ewing, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/24 (2006.01); C23C 14/12 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); C23C 14/12 (2013.01); C23C 16/45517 (2013.01); C23C 16/45525 (2013.01); C23C 16/45563 (2013.01); C23C 16/45565 (2013.01); C23C 16/45574 (2013.01); C23C 16/45578 (2013.01); C23C 16/545 (2013.01); H01L 51/0005 (2013.01); H01L 51/0085 (2013.01);
Abstract
A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.