The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
May. 11, 2020
Applicant:
L'air Liquide, Société Anonyme Pour L'etude ET L'exploitation Des Procédés Georges Claude, Paris, FR;
Inventors:
Antonio Sanchez, Tsukuba, JP;
Jean-Marc Girard, Versailles, FR;
Grigory Nikiforov, Bridgewater, NJ (US);
Nicolas Blasco, Echirolles, FR;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/14 (2006.01); C07F 7/28 (2006.01); C23C 16/455 (2006.01); C23C 16/34 (2006.01);
U.S. Cl.
CPC ...
C07F 7/28 (2013.01); C23C 16/14 (2013.01); C23C 16/34 (2013.01); C23C 16/45553 (2013.01);
Abstract
Disclosed are methods of synthesizing and using Titanium-containing film forming compositions comprising titanium halide-containing precursors to deposit Titanium-containing films on one or more substrates via vapor deposition processes.