The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
May. 24, 2019
International Business Machines Corporation, Armonk, NY (US);
Jianshi Tang, Elmsford, NY (US);
Takashi Ando, Tuckahoe, NJ (US);
Reinaldo Vega, Mahopac, NY (US);
Praneet Adusumilli, Somerset, NJ (US);
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Abstract
A semiconductor device with an array of vertically stacked electrochemical random-access memory (ECRAM) devices, includes holes formed in a vertical stack of horizontal electrodes. The horizontal electrodes are horizontally aligned and stacked vertically at different vertical levels within the vertical stack and separated by first fill layers. The semiconductor device includes a stack deposition, including a channel layer, and an electrolyte layer, formed over the vertical stack and holes. Selector layers fill holes. The selector layers include an inner selector layer and outer selector layers. The channel layer, the electrolyte layer and outer selector layers are recessed to the inner selector layer and a fill layer is deposited over the vertical stack. The fill layer has been reduced down to the top of the inner selector layer.