The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 02, 2021

Filed:

Jan. 17, 2020
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Nicolas Normand, Herouville Saint Clair, FR;

Stéphane Bouvier, Cairon, FR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/07 (2006.01); H01L 27/06 (2006.01); H01L 49/02 (2006.01); H01L 29/66 (2006.01); H01L 29/94 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0794 (2013.01); H01L 27/0682 (2013.01); H01L 28/24 (2013.01); H01L 28/40 (2013.01); H01L 29/66181 (2013.01); H01L 29/945 (2013.01);
Abstract

An integrated resistor-capacitor (RC) structure () is disclosed. The integrated RC structure includes a vertical capacitor () and a resistive element () disposed above the capacitor. The integrated RC structure uses a low ohmic substrate () to ensure a good ground return path for the capacitor. Further, a resistivity of the substrate is configured such that a top plate () of the capacitor provides a reference ground above a predefined frequency. The impedance of the resistive element () is matched, relative to the reference ground, to a predetermined resistance. As such, the resistance of the resistive element () can be controlled to provide an impedance controlled RC structure over a range of operating frequencies.


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