The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 02, 2021

Filed:

Sep. 23, 2015
Applicant:

Inficon Ag, Balzers, LI;

Inventor:

Martin Wüest, Malans, CH;

Assignee:

INFICON AG, Balzers, LI;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/30 (2006.01); G01L 21/34 (2006.01); G01N 27/60 (2006.01); G01N 27/62 (2021.01); G01N 27/66 (2006.01); G01N 27/68 (2006.01); G01N 27/70 (2006.01); H01J 41/06 (2006.01);
U.S. Cl.
CPC ...
H01J 41/06 (2013.01); G01L 21/34 (2013.01); H01J 2237/18 (2013.01); H01J 2237/31701 (2013.01);
Abstract

The invention relates to an ionization vacuum measuring cell () comprising an evacuable housing () with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber () in the housing (), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber () is designed as a replaceable component; and a first and a second electrode () in the measurement chamber (), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough () for an electric supply to the second electrode () and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (), in particular at least one of the electrodes (), comprises a magnetic material.


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