The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 02, 2021

Filed:

Apr. 25, 2019
Applicant:

Measurement Specialties, Inc., Hampton, VA (US);

Inventors:

Ya-Mei Chen, Fremont, CA (US);

James Hoffman, Santa Clara, CA (US);

Assignee:

MEASUREMENT SPECIALTIES, INC., Hampton, VA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/18 (2006.01); G01L 1/22 (2006.01); G01L 1/26 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 1/18 (2013.01); G01L 1/2237 (2013.01); G01L 1/26 (2013.01); G01L 9/0055 (2013.01);
Abstract

The sensor assembly comprises a sensor die comprising first and second members. The first member accommodates an actuation element on a second surface of the first member and in contact with a diaphragm that is integral with the first member. The second member is bonded to a first surface of the first member opposite the second surface, and sensing elements are positioned adjacent the diaphragm along the first surface and interposed between the first and second members. The second member also includes a recessed section that forms a cavity adjacent the diaphragm to accommodate and/or limit diaphragm deflection. An internal electrical connection is made between first and second member electrical contacts disposed along the interface between the first and second members to avoid external wires. The second member further includes external electrical terminals to facilitate an electrical surface connection with the sensor assembly without the need for external wires.


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