The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
Jul. 10, 2018
Horiba Stec, Co., Ltd., Kyoto, JP;
Tadahiro Yasuda, Irvine, CA (US);
Thomas Hoke, Irvine, CA (US);
HORIBA STEC, Co., Ltd., Kyoto, JP;
Abstract
Provided is a fluid control apparatus that without enhancing temporal control performance, every time, can stabilize a fluid flow rate achieved by, for example, pulse control, and eliminate fluid wasted at the time of supplying the fluid by including one flow path. A control mechanism includes a first feedback controller adapted to control a first valve on the basis of first pressure measured by a first pressure sensor. In addition, when a second valve is closed, the first pressure feedback controller controls the first valve so that the first pressure measured by the first pressure sensor reaches target burst pressure, and when and after the first pressure reaches the target burst pressure and the second valve is opened, the control mechanism is configured to control the first valve so that the flow rate of the fluid flowing through the flow path reaches a target constant flow rate.