The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 02, 2021
Filed:
Dec. 21, 2019
Applicant:
Metox Technologies, Inc., Houston, TX (US);
Inventors:
Mikhail Novozhilov, Houston, TX (US);
Alex Ignatiev, Houston, TX (US);
Assignee:
MetOx Technologies, Inc., Houston, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/18 (2006.01); C23C 16/455 (2006.01); C23C 16/48 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C23C 16/448 (2013.01); C23C 16/45561 (2013.01); C23C 16/482 (2013.01);
Abstract
A dry powder MOCVD vapor source system is disclosed that utilizes a gravimetric powder feeder, a feed rate measurement and feeder control system, an evaporator and a load lock system for continuous operation for thin film production, particularly of REBCO type high temperature superconductor (HTS) tapes.