The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
Aug. 22, 2018
Applicant:
Fujifilm Corporation, Tokyo, JP;
Inventors:
Hideaki Tsubaki, Haibara-gun, JP;
Wataru Nihashi, Haibara-gun, JP;
Assignee:
FUJIFILM Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/16 (2006.01); G03F 7/20 (2006.01); G03F 7/09 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0043 (2013.01); G03F 7/09 (2013.01); G03F 7/16 (2013.01); G03F 7/2059 (2013.01); G03F 7/322 (2013.01); Y02P 70/50 (2015.11);
Abstract
An actinic ray-sensitive or radiation-sensitive composition contains a cation including a metal atom and a ligand, in which the number of particles in liquid having particle diameters of 0.15 μm or less included in 1 mL of the actinic ray-sensitive or radiation-sensitive composition is 10 or less.
Tsubaki, Hideaki. (2021). Actinic ray-sensitive or radiation-sensitive composition, method for purifying actinic ray-sensitive or radiation-sensitive composition, pattern forming method, and method for manufacturing electronic device (U.S. Patent No. 11156915). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11156915
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile