The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 26, 2021
Filed:
Aug. 01, 2017
Vmicro, Villeneuve d'Ascq, FR;
Centre National DE LA Recherche Scientifique, Paris, FR;
Universite Lille-1, Villeneuve d'Ascq, FR;
Benjamin Walter, Lille, FR;
Marc Faucher, Lesquin, FR;
Estelle Mairiaux-Mage, Villeneuve D'Ascq, FR;
VMICRO, Villeneuve d'Ascq, FR;
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris, FR;
UNIVERSITE LILLE-1, Villeneuve d'Ascq, FR;
Abstract
A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.