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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11154792 B1

PDFFull Text
Date of Patent:
Oct. 26, 2021

Filed:

Aug. 10, 2016

Methods and systems for generating process gases

Applicant:

Rasirc, Inc., San Diego, CA (US);

Inventors:

Jeffrey Spiegelman, San Diego, CA (US);

Douglas Shepherd, El Cajon, CA (US);

Russell J. Holmes, San Diego, CA (US);

Zohreh Shamsi, San Diego, CA (US);

Assignee:

RASIRC, INC., San Diego, CA (US);

Attorney:

MLO, a professional corp.

Primary Examiner:

Justin C Dodson

Assistant Examiner:

Dilnessa B Belay

Int. Cl.
CPC ...
B01B 1/00 (2006.01); C23C 16/448 (2006.01); A61L 2/20 (2006.01); A61L 2/26 (2006.01); F22B 3/02 (2006.01); H05B 1/02 (2006.01); G03F 1/82 (2012.01); G03F 7/42 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
B01B 1/005 (2013.01); A61L 2/20 (2013.01); A61L 2/208 (2013.01); A61L 2/26 (2013.01); C23C 16/4481 (2013.01); C23C 16/4485 (2013.01); F22B 3/02 (2013.01); H05B 1/0297 (2013.01); A61L 2202/14 (2013.01); G03F 1/82 (2013.01); G03F 7/423 (2013.01); H01L 21/02057 (2013.01); H01L 21/02271 (2013.01);
Abstract

Methods for the gas-phase delivery of gases, such as process gases, from the gas phase of a multicomponent source liquid are provided. The methods are generally directed to the generation of process gases having mass flow rates which are proportional to the input power delivered to the multicomponent source liquid containers. The methods may be used to deliver process gases to critical process applications.

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Quick Actions:

Spiegelman, Jeffrey. (2021). Methods and systems for generating process gases (U.S. Patent No. 11154792). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11154792

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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