The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Aug. 29, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Bruce B. Doris, Slingerlands, NY (US);

Eileen A. Galligan, Fishkill, NY (US);

Nathan P. Marchack, New York, NY (US);

Pouya Hashemi, Purchase, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 41/47 (2013.01); H01L 43/02 (2006.01); H01L 27/22 (2006.01); H01L 43/08 (2006.01); H01L 45/00 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01L 27/222 (2013.01); H01L 41/47 (2013.01); H01L 43/02 (2013.01); H01L 43/08 (2013.01); H01L 45/08 (2013.01); G11C 2211/5615 (2013.01);
Abstract

A dielectric material structure is formed laterally adjacent to a bottom portion of a bottom electrode metal-containing portion that extends upward from an electrically conductive structure that is embedded in an interconnect dielectric material layer. The physically exposed top portion of the bottom electrode metal-containing portion is then trimmed to provide a bottom electrode of unitary construction (i.e., a single piece) that has a lower portion having a first diameter and an upper portion that has a second diameter that is greater than the first diameter. The presence of the dielectric material structure prevents tilting and/or bowing of the resultant bottom electrode. Thus, a stable bottom electrode is provided.


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