The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Feb. 25, 2020
Fuji Electric Co., Ltd., Kawasaki, JP;
Katsunori Ueno, Matsumoto, JP;
FUJI ELECTRIC CO., LTD., Kawasaki, JP;
Abstract
The nitride semiconductor device includes: a nitride semiconductor layer; a first conductivity type source region provided on a surface of the nitride semiconductor layer; a second conductivity type well region provided in the nitride semiconductor layer and adjacent to the source region in a first direction parallel to the surface and in a second direction intersecting with the first direction; a trench located on the opposite side of the source region with the well region sandwiched therebetween in the first direction; a first conductivity type impurity region located between the well region and the trench; an insulating film provided on a bottom surface of the trench; a gate insulating film provided on the well region; and a gate electrode provided from on the insulating film to on the gate insulating film. A thickness of the insulating film is larger than a thickness of the gate insulating film.