The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Feb. 24, 2020
Applicant:

Kioxia Corporation, Minato-ku, JP;

Inventor:

Kizashi Tanioka, Yokkaichi, JP;

Assignee:

Kioxia Corporation, Minato-ku, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 25/00 (2006.01); H01L 25/18 (2006.01); H01L 23/00 (2006.01); H01L 21/78 (2006.01); H01L 21/304 (2006.01);
U.S. Cl.
CPC ...
H01L 25/50 (2013.01); H01L 21/78 (2013.01); H01L 24/80 (2013.01); H01L 25/18 (2013.01); H01L 21/3043 (2013.01); H01L 2924/3511 (2013.01);
Abstract

According to an embodiment, a method for manufacturing a semiconductor device includes forming a slit in a first wafer in which a first semiconductor layer is formed on a first substrate, sticking together the first wafer in which the slit is formed and a second wafer in which a second semiconductor layer is formed on a second substrate, the sticking being performed between a side of the first semiconductor layer and a side of the second semiconductor layer, thinning the first substrate or the second substrate of a member obtained by the sticking, forming an interconnection on a face of the substrate that is thinned, and dicing a member on which the interconnection is formed in accordance with a position of the slit.


Find Patent Forward Citations

Tanioka, Kizashi. (2021). Method for manufacturing semiconductor device (U.S. Patent No. 11152345). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11152345

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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