The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 19, 2021
Filed:
Aug. 05, 2020
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Noh Hoon Myoung, Seoul, KR;
Han Seon Kang, Gyeonggi-do, KR;
Jung Min Yoon, Daegu, KR;
Chung Il Cho, Seoul, KR;
Assignee:
Semes Co., Ltd., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B66C 13/40 (2006.01); F16F 15/03 (2006.01); H01L 21/67 (2006.01); B66C 19/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67733 (2013.01); B66C 13/40 (2013.01); B66C 19/00 (2013.01); F16F 15/035 (2013.01); H01L 21/6773 (2013.01); H01L 21/67259 (2013.01); H01L 21/67709 (2013.01);
Abstract
Provided is an apparatus for conveying a carrier and a system for controlling a carrier having the same, which couples a hoist and a hand using a non-contact damping structure using an eddy current. The apparatus for conveying the carrier conveys a carrier containing a wafer, and includes: a gripper for gripping the carrier; and a lifter for raising and lowering the gripper, in which the gripper and the lifter are connected in a non-contact damping structure, and a relative motion thereof is suppressed.