The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2021

Filed:

Apr. 20, 2016
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Takashi Ando, Tuckahoe, NY (US);

John Bruley, Poughkeepsie, NY (US);

Eduard A. Cartier, New York, NY (US);

Martin M. Frank, Dobbs Ferry, NY (US);

Vijay Narayanan, New York, NY (US);

John Rozen, Hastings on Hudson, NY (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/28 (2006.01); H01L 29/40 (2006.01); H01L 29/51 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
H01L 21/28255 (2013.01); H01L 21/28229 (2013.01); H01L 21/28264 (2013.01); H01L 29/401 (2013.01); H01L 29/41725 (2013.01); H01L 29/517 (2013.01); H01L 29/66522 (2013.01); H01L 29/66545 (2013.01); H01L 29/785 (2013.01); H01L 29/66795 (2013.01); H01L 29/78 (2013.01);
Abstract

A method of forming a semiconductor device that includes forming a metal oxide material on a III-V semiconductor channel region or a germanium containing channel region; and treating the metal oxide material with an oxidation process. The method may further include depositing of a hafnium containing oxide on the metal oxide material after the oxidation process, and forming a gate conductor atop the hafnium containing oxide. The source and drain regions are on present on opposing sides of the gate structure including the metal oxide material, the hafnium containing oxide and the gate conductor.


Find Patent Forward Citations

Loading…